- All sections
- H - Electricity
- H01J - Electric discharge tubes or discharge lamps
- H01J 27/16 - Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation
Patent holdings for IPC class H01J 27/16
Total number of patents in this class: 90
10-year publication summary
|
8
|
7
|
9
|
4
|
5
|
3
|
0
|
2
|
3
|
0
|
| 2015 | 2016 | 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| FEI Company | 851 |
14 |
| Varian Semiconductor Equipment Associates, Inc. | 1282 |
7 |
| Canon Anelva Corporation | 676 |
7 |
| Centre National de La Recherche Scientifique | 9632 |
4 |
| Schlumberger Technology Corporation | 9690 |
3 |
| Ecole Polytechnique | 308 |
3 |
| Shine Technologies, LLC | 92 |
3 |
| Schlumberger Canada Limited | 6913 |
2 |
| Schlumberger Technology B.v. | 4951 |
2 |
| Tokyo Electron Limited | 11599 |
2 |
| Commissariat à l'énergie atomique et aux energies alternatives | 10525 |
2 |
| Adelphi Technology, Inc. | 16 |
2 |
| Astrium GmbH | 48 |
2 |
| Clemson University Research Foundation | 160 |
2 |
| Oregon Physics, LLC | 5 |
2 |
| Services Petroliers Schlumberger | 5426 |
2 |
| The Welding Institute | 32 |
2 |
| ION LAB Co., Ltd. | 2 |
2 |
| E. I. du Pont de Nemours and Company | 4345 |
1 |
| Mitsubishi Heavy Industries, Ltd. | 8217 |
1 |
| Other owners | 25 |